OK, as much as I believe in theory, experimental confirmation would be nice. This is hard to come by, since the formation of the C=O is a substantial driving force for collapse of the tetrahedral intermediate.
However, it is possible to trick the enzymes, and get them to make a tetrahedral intermediate that can't break down.
Meyer [J. Am. Chem. Soc., 1989, 111, 3368; Biochemistry, 1989, 28, 7610] has done this in two ways, one more successful than the other.
The first trick uses a fluoroketone substrate:

Note that the carbonyl the arrows point to is a ketone, not an amide, carbonyl.
| Subtilisin with Covalent Inhibitor (4est) |
|---|
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The other trick was to provide a boron, in the form of Cbz-Ala-Ile-B(OH), which is sp2, and thus resembles a carbonyl carbon. In this case, Meyer got more than he bargained for; the His57 also binds to the boron:

| Subtilisin with Boric Acid Inhibitor (5est) |
|---|
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Where next? Here's the tetrahedral intermediate, bound to Ser195 with the former carbonyl oxygen in the "oxyanion hole".

The next step is the reconstruction of the carbonyl double bond, with expulsion of the leaving group - in this case, the rest of the protein.
This is the stage at which the protein chain actually is cleaved, and it produces an "acyl enzyme": the acyl part of the peptide that was cleaved, bound as an ester to Ser195.

Now we have an actual stable intermediate, much more likely than the tetrahedral intermediate to hang around for a while and let us look at it. The next page addresses some of the evidence for this intermediate.